Home » EUV Lithography (SPIE Press Monograph Vol. PM178) (Press Monograph) (Press Monograph) (Press Monograph) by Vivek Bakshi
EUV Lithography (SPIE Press Monograph Vol. PM178) (Press Monograph) (Press Monograph) (Press Monograph) Vivek Bakshi

EUV Lithography (SPIE Press Monograph Vol. PM178) (Press Monograph) (Press Monograph) (Press Monograph)

Vivek Bakshi

Published November 28th 2008
ISBN : 9780819469649
Hardcover
800 pages
Enter the sum

 About the Book 

EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the worlds leading EUVL researchers, and provides all the critical information needed byMoreEUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the worlds leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.